半导体制造的统计方法.pdf

StatisticalMethods

forSemiconductorManufacturing

Ph.D.candidate:GianAntonioSusto

Director:prof.MatteoBertocco

Advisor:prof.AlessandroBeghi

Ph.D.SchoolinInformationEngineering

DepartmentofInformationEngineering

January2013

Essentially,allmodelsarewrong,

butsomeareuseful.

GEORGEE.P.BOX

Summary

Inthisthesistechniq

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