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半导体制造中联合维护与质量控制策略分析.pdf

半导体制造中联合维护与质量控制策略分析.pdf

    Analysisofjointmaintenance

    andqualitycontrolstrategyin

    semiconductorfabrication

    TESIDILAUREAMAGISTRALEIN

    MANAGEMENTENGINEERING

    Author:AlessandroBaratelli

    StudentID:953440

    Advisor:TullioAntonioMariaTolio

    Co-advisor:MariaChiaraMagnanini

    AcademicYear:2021-22

    Abstract

    Nowadaysthesemiconductormanufacturingsystemisclaimingformore

    predictiveengineeringtoolstogiveaprognosticviewofthemanufacturingsystem

    equipment’shealth.Infact,degradationofacomponent/systemisoneofthemajor

    factorsthatcaused

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