SEMI E32.1—0997 SECS-II支持材料移动.pdf

SEMIE32.1-0997

SECS-IISUPPORTFORMATERIALMOVEMENT

1Introduction

ThisdocumentcontainsthenecessaryinformationtoimplementtheMaterialMovementManagementstandard

usingtheSEMIE5SECS-IIcommunicationsprotocol.

2ServicetoMessageMapping

ThetablebelowlistseachmessageservicedefinedintheMaterialMovementstandardwiththeSECS-IImessage

whichshouldbeusedtoperformthatservice.

ServiceSECS-IIMsgComments

TRJobCreate

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