GBT 33555-2025 洁净室及相关受控环境 静电控制技术要求标准立项发展报告.docx

洁净室及相关受控环境静电控制技术要求

StandardizationDevelopmentReport:TechnicalRequirementsforElectrostaticControlinCleanroomsandAssociatedControlledEnvironments

摘要

关键词：洁净室；受控环境；静电控制；静电放电；国家标准；ESD；洁净技术

Abstract

Withtherapidadvancementofhigh-technologyindustriesinChina,cleanroomsandassociatedcontrolledenvironmentshavebeenwidelyappliedinsemiconductormanufacturing,flatpaneldisplay,biopharmaceuticals,precisioninstrumentation,aerospace,andotherfieldsthatarehighlysensitivetoelectrostaticeffects.ElectrostaticDischarge(ESD)andElectrostaticAttraction(ESA)haveb