GBT 31058-2026 电子气体 四氟化硅标准立项发展报告.docxVIP

电子气体四氟化硅标准立项发展报告

StandardizationDevelopmentReport:ElectronicGas—SiliconTetrafluoride

摘要

关键词：电子气体；四氟化硅；国家标准；标准化；半导体材料；纯度控制；技术规范

Abstract

Silicontetrafluoride(SiF?),asanindispensablekeyelectronicspecialtygasinintegratedcircuitmanufacturing,opticalfiberpreformpreparation,andphotovoltaicindustry,hasitspurityandimpuritycontentdirectlydeterminingtheyieldandreliabilityofdownstreamproducts.WiththecontinuousexpansionofChinassemiconductorindustryandthecontinuousevolutionofprocessnodes,higherrequirementshavebeenputforwardforthequalityc