微电子工艺原理.pdf

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微电子工艺原理.pdf

微电子工艺原理

一、单项选择

1.Themostcoonreticlereductionratiousedwith

step-and-scanexposuretoolsis（D）

a.1:1and4:1b.1:1and5:1c.4:1and5:1

d.4:1

2.Whichofthefollowingprocessesareperformed

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