毕业论文：超精密装置PID振动控制系统的设计.doc

摘 要 在仿生啄木鸟头部独特生物构造和隔振机理的基础上，采用主动隔振技术建立了超精密装置隔振系统结构及动力学模型。结合超精密装置隔振系统的结构特点和性能要求，采用闭环PID主动控制系统，用MATLAB软件进行了仿真分析研究。仿真分析结果表明，该振动控制系统宽频率范围内具有良好的减振效果，该系统可应用于超精密测量、超精密制造设备的隔振领域。 关键词：超精密装置；仿生学；主动振动控制；PID控制 Abstract To keep the ultra-precision device from the micro-disturbance of environment, a structure and kinetic model of a vibration control system were established with a passive air-spring which reduces vibrations of high-frequency area and a giant magneto strictive actuator which reduces those of low-frequency area, which is imitative of the isolation mechanics and special organic texture of woodpecker’s brain. In consideration of complex vibration environment and nonlinear ultra-precision device, a closed loop PID active control system was adopted. The system was simulated by Matlab. Results of simulations show that the control system can effectively restrain the disturbance whose frequency range form 0-100 Hz. It can be applied to the vibration isolation field of the ultra-precision measuring and manufacturing device. Key words: ultra-precision device; bionics; active vibration control; PID control 目 录 TOC \o 1-3 \h \z \u HYPERLINK \l _To1 概述 1 HYPERLINK \l _To2 超精密装置隔振系统模型 2 HYPERLINK \l _To2.1超精密装置隔振系统结构模型 2 HYPERLINK \l _To2.2 超精密装置隔振系统的动力学模型 PAGEREF _To\h 3 HYPERLINK \l _To3 超精密装置PID振动控制系统设计模型 6 HYPERLINK \l _To3.1 概述 6 HYPERLINK \l _To3.2 PID控制原理 7 HYPERLINK \l _To3.2.1 模拟PID控制器 7 HYPERLINK \l _To3.2.2数字PID控制算法 8 HYPERLINK \l _To3.3 自适应控制 1 PAGEREF _To\h 3 HYPERLINK \l _To3.3.1自适应控制的系统框图 1 PAGEREF _To\h 3 HYPERLINK \l _To3.3.2 自适应控制的类型 15 HYPERLINK \l _To3.3.3 自适应PID控制 18 HYPERLINK \l _To3.4 智能PID控制 19 HYPERLINK \l _To3.4.1智能控制的含义 19 HYPERLINK \l _To3.4.2 智能控制的功能特点 20 HYPERLINK \l _To3.5 模糊PID控制 21 HYPERLINK \l _To3.5.1模糊控制的基本原理 21