光学薄膜的堆积密度及密度均匀性的分析与计算.pdfVIP

第 21 卷　第 45 期 　　 光　学　仪　器 V o l. 21,N o. 45 　1999 年 10 月 O PT ICAL IN STRUM EN T S 　O ctober, 1999 An Ana lysis and Ca lcula tion of the O ptica l Th in F ilm Pack ing D en sity and D en sity Un iform ity TA N G Q i　K IKU CH I K az uo (Sh incron Co. ,L td , Tokyo 1408540) 　　 : Abstract T he pack ing den sity of depo sited op tical th in film s is u sually cal cu lated by the variation of index values in vacuum and in atm o spheric hum idity. , In ou r IAD experim en ts w e found that the pack ing den sity of som e film s calcu lated by th is m ethod is larger than 1. 0. T h is m ean s its structu re is den ser than that of am o rphou s natu re. T he reason fo r th is is it has a strong com p ressive . stress in film W e also found that the w avelength sh ifts of som e film s depo sited ′ by IAD don t have a dependence upon the pack ing den sity becau se they have dif . feren t m icro structu ral un ifo rm ity under differen t p rocess param eters T he pack ing den sity and den sity un ifo rm ity coefficien t depo sited by EB and IAD w ith dif feren t p rocess param eters are calcu lated and analyzed. T he m icro structu res of the film w ere investigated by m ean s of SEM . : , , , Key W ords Op tical T h in F ilm Pack ing D en sity D en sity U n i