大气压氦冷等离子体射流特性诊断.doc

  大气压氦冷等离子体射流特性诊断 孙旭东，任春生** （大连理工大学物理与光电工程学院，大连 116024） 5 10 15 20 25 30 35 40 摘要：采用针-环结构的介质阻挡大气压冷等离子体射流装置，在大气压下，利用氦气且用 频率固定为 30kHz 的等离子体电源作驱动电源产生冷等离子体射流。通过测量电参数（电 压，传导电流）去研究放电的电特性。为了求得其激发温度，选用了 3 条氦的特征谱线去作 线性拟合，选取波长分别为 587.6nm，706.5nm，728.1nm，采用了波尔兹曼作图法进行计算。 此外，还对石英管内的气体温度进行了估算。用光纤温度传感器（FOT-L-SD）对管外气体 温度进行了测量。通过实验，发现所得参数（放电电流均方根值，激发温度）随所加电压增 大而增大，同时随气流量的增大而减小。还发现放电管内气体温度比同等实验条件下管外射 流温度高。 关键词：介质阻挡放电；大气压；冷等离子体射流；诊断；温度 中图分类号：O53 Diagnostics of atmospheric pressure cold helium plasma jet SUN Xudong, REN Chunsheng (School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024) Abstract: A cold helium plasma jets developed by a specially designed device consisting of one powered electrode and one grounded ring electrode, which is actually based on a DBD configuration and driven by a sinusoidal excitation voltage at 30 kHz. Applied voltage, root mean square value of conducting current, and average absorbed power are obtained. The characteristic spectral lines 587.6nm，706.5nm and 728.1nm of He atoms are chosen to determine the excitation temperature under a Boltzmann approximation. The electron excitation temperature is estimated by using Boltzmanns plot method. Helium gas temperature in discharge tube is also estimated. In addition, the temperature of plasma effluent (plasma jet outside of the quartz tube) is observed by using fiber optic temperature sensor (FOT-L-SD). It shows that the root mean square value of conducting current, and the excitation temperature increase with the applied voltage. However, these parameters decrease with argon gas flow rate. In addition, we also find that the gas temperature in the tube is higher than outside under the same experiment condition. Key words: DBD discharge; atmospheric pressure; cold plasma jets; diagnostics; gas temperature 0 引言 伴随着社会的发展，科学技术的进步，在大气压低温等离子体放电技术层面，大气压冷 等离子射流是近年来兴起的一种新的大气压低温等离子体放电技术，成为研究的热点。大气 压冷等离子体射流，不但非常容易操作，而且具有很好的可控性，温度也比较低，使得它在 杀菌消毒[1-3]，材料表面改性[4-5]以及生物医用方面[6-7]有着广阔的应