论文0603型钽电解电容器关键工艺的研究.docVIP

论文题目： 学科名称：微电子学与固体电子学 研 究 生： 签 名：指导教师：签 名： 签 名：μF产品表征参数测试结果表明：产品电性能符合国际IEC-535BAAC标准,验证了氧化膜生长工艺和阴极被覆参数的正确性。 为今后0603型钽电解电容器产品制造，解决了氧化膜的生长工艺和阴极MnO2被覆工艺两大技术难点。关键词：0603型；钽电解电容器；高比容钽粉；制造工艺Title:RESEARCH ON KEY PROCESS FOR 0603 CASE TANTALUM ELECTROLYTIC CAPACITOR Major: Microelectronics and Solid Electronics Name: Yunfei XU Signature: Supervisor: Prof. engineering Chunguang LI Signature: Associate prof. Tao AN Signature: Abstract Along with rapid development of chip and miniaturization in electronic components, tantalum capacitors of previous sizes cannot adap to current trend, so it is very urgent to develop miniaturized tantalum capacitors for meeting a crying need in current market. At present 0603 case tantalum electrolytic capacitor is the minimum size. There are two main technical difficulties in the 0603 case tantalum capacitor technology:①The quality of the oxide film.②The quality of MnO2 cathode coating. This paper made a deep study on the oxide film growth and cathode MnO2 coating quality owing to the application of the high CV tantalum powder. Firstly, A deep theoretical analysis was made on oxide film growth process parameters and the cathode MnO2 coating process parameters. Secondly,through a large number of oxide film growth and cathode MnO2 coating experiments,the formation process and cathode coating process parameters were obtianed.Through analyzing and discussing the experiment datas of four characterization parameters, the formation process and cathode coating process parameters are:①When formation,0.2%(volume ratio)nitric acid solution, 70℃ temperature, 40mA/g moderate current density ,5 hours contant voltage time and 250℃/10min heat treatment can make the oxide film qulity best ,also leakage current of dielectric is the minimum.②The best inner MnO2 coating process parameters are 1.20g/ml manganese nitrate solution added 2%NH4NO3 and dipping 6 times.T