中英文文献翻译-采用表面微加工技术制造微型行星齿轮减速器说明书.pdfVIP

本科毕业设计（论文）通过答辩 翻译部分 英文原文 MICROPLANETARYREDUCTIONGEARUSING SURFACE-MICROMACHINING Abstract A micro planetary gear mechanism featuring a high gear reduction ratio with compactness in size ispresented in this paper. SUMMiT V is employed for the fabrication method so that the redundancy of assembling parts is eliminated. The design rules of which has also been checked. To make full use of the benefits of the surface- micro - machining, the planetary reduction gear is designed toward using the on-chip micro- engine. The expected gearreduction ratio is calculated and compared with the conventional chain gear mechanism. The microplanetary gear mechanism presented in this paper is expected to have 162:1 reduction ratio utilizing less space consumption. This is an order of magnitude higher than the previously reported design in a single reduction gear train. Keywords:MEMS, planetary gear, reduction gear surface-micromachining, SUMMiT V process Nomenclature a sun gear b planet gears c internal gear (fixed) d internal gear (rotary) n the number of units of gear train D diameter of the pitch circle N number of teeth P number of planets  angular velocity Introduction The gear mechanisms in microelectro mechanical systems(MEMS) are commonly expected to generate high torque in the confined micro-size systems. However, it is generally difficult for the micro-scale systems to have such a high 本科毕业设计（论文）通过答辩 torque without having multiple reduction systems. The design of the reduction gear drive based on a planetary parado gear mechanism can increase the torque within a compact area, since the microplanetary gear system has an advantage of high reduction ratio per unit volume [1]. However its mechanis