摩擦副对不含氢GLC薄膜摩擦学性能的影响本科精品毕业论文.docVIP

摩擦副对不含氢GLC薄膜摩擦学性能的影响 摘 要 本文通过非平衡磁控溅射沉积离子镀膜的方法制备了GLC薄膜，在旋转式球-盘摩擦磨损试验机上考察了对偶材料对GLC薄膜的摩擦性能的影响。在摩擦完毕后，采用扫描电镜对磨痕形貌进行了观察，使用非接触式三维表面轮廓仪测量了磨痕深度和宽度并对磨损率进行了计算分析。研究结果表明： 1、固定载荷,随着速度的增大，GLC/GCr15体系的摩擦系数逐渐减小，比磨损率由小变大后又变小；GLC/Si3N4、GLC/Al2O3GLC/GCr15体系的比磨损率大体上呈下降趋势；GLC/Si3N4、GLC/Al2O3GLC薄膜，速度，载荷，摩擦，磨损 EFFECT OF COUNTERPART MATERIALS ON TRIBOLOGICAL PROPERTIES OF H-FREE GLC FILMS ABSTRACT H-free GLC films were prepared by using an unbalanced magnetron sputtering deposition method. Effects of counterpart materials on tribological properties of GLCs were examined on a rotation-type ball-on-disc tribometer. After the tests, the wear tracks and debris were observed using a scanning electron microscope. In addition, a non-contact three-dimensional surface profiler was employed to measure the depth and width of wear tracks and to calculate the specific wear rate. The major results are shown as below:  1. As the sliding speed increases under a constant load, the friction coefficient generally decreases, but the wear rate first increases and then decreases for the GLC/GCr15 system. While for the GLC/Si3N4 and GLC/Al2O3 systems, both the friction coefficient and wear rate increase generally.  2. As the load increases at a constant sliding speed, the three systems commonly display a reduction in friction coefficient. But the wear rate does not change consistently. It decreases for the GLC/GCr15 pair but increases for the GLC/Si3N4 and GLC/Al2O3 pairs with increasing load. KEY WORDS: GLC film, speed, load, friction, wear 目 录 第一章 前 言 1 §1.1 碳膜的发展和应用 1 §1.1.1 碳膜的发展 1 §1.1.2 碳膜的应用 2 §1.2 碳膜的结构特点 3 §1.3 碳膜的制备原理和结构表征 3 §1.3.1 碳膜的制备原理 3 §1.3.2 碳膜结构表征 5 §1.4 GLC薄膜的研究现状 6 §1.5 GLC薄膜的研究意义 8 §1.6 本课题的研究方法 9 第二章 试验设备和方法 10 §2.1 制备GLC薄膜的试验设备 10 §2.1.1 试验装置 10 §2.1.2试验材料 10 §2.1.3 制备过程 10 §2.2 GLC薄膜摩擦学性能的研究方法及过程 11 §2.2.1试验装置 11 §2.2.2试验材料 12 §2.2.3 试验方法及过程 12 §2.3 磨损率计算 13 第三章 结果与分析 14 §3.1 GLC/GCr15体系的摩擦磨损性能 14 §3.1.1 速度对GLC/GCr15体系摩擦磨损性能的影响 14 §3.1.2 载荷对GLC/GCr15体系摩擦磨损性能的影响 17 §3.1.3 不