通过调相式载波消除外差干涉仪非线性.docxVIP

通过调相式载波消除外差干涉仪的非线性Serge Dubovitsky, Oliver P. Lay, and David J. SeidelJet Propulsion Laboratory, M/S 301-451, 4800 Oak Grove Drive, Pasadena, California 91109Received October 8, 2001Accuracy in measuring displacement in optical interferometers is limited by cyclic errors introduced by variousleakage paths within the system. Existing techniques to reduce this nonlinearity do not work when there islarge optical loss in the target path, such as for long-range measurements. We describe a new approach toreducing nonlinearity that overcomes these limitations. Based on phase modulation of the laser light, andrequiring minimal additional components, experiments have demonstrated rejection of the effects of leakagein the presence of large optical loss. ? 2002 Optical Society of America光学干涉仪测量位移的精确度受限于循环误差所引入的各种系统内泄漏路径（leakage paths）。现有的技术来减少这种非线性在目标路径有大量光损耗如远程测量时不可行。我们描述了一种新的方式来减少非线性,克服这些局限性。基于相位调制的激光,并要求最少组件,实验已证明拒绝泄漏影响的大量光损耗的存在。2002年美国?光学学会OCIS codes: 120.3940, 120.3180, 120.5060.Optical interferometry is a method of choice for measurementsof submicrometer displacements.光学干涉是对亚微米级位移测量的一种选择方法。Mostpractical interferometers used for precision sensingare based on the heterodyne interferometer, owingto its high-precision readout afforded by heterodynesignal processing. 最实用的干涉仪用于精密感应是基于外差干涉仪,由于自身的高精度读出所给予的外差信号处理。However, a typical opticalheterodyneinterferometer is limited in its resolution byparasitic leakage ofoptical signals, called polarizationleakage or polarization mixing, which resultsin undesiredself-interference heterodyne beats atthe photodetector.1–3 然而，一个典型的光学外差干涉仪受限于它的分辨率通过无源泄漏的光信号，被称为极化泄漏或极化混合，结果是不期望的自干涉外差跳动在光电探测器上。Self-interference (SI) causesa cyclic nonlinearity in the interferometer’s phase-versus-displacement response. 自干涉导致循环在干涉仪的phaseversus-displacement非线性响应。The magnitude of theerror is proportional to the ratio of the SI level to thedesired range-related signal. 误差的大小是成正比的比值自干涉水平所需的range-related信号。Typically this ratio isof the order of a few percent and res