电容MEMS超声换能器研究进展.pdfVIP

第31 卷 第4 期 Vol.31, No.4 2012 年7 月 Applied Acoustics July, 2012 30 电容 MEMS 超声换能器研究进展 栾桂冬† （北京大学信息科学技术学院 北京 100871 ） 摘要 MEMS （micro-electromechanical systems ）超声换能器（MEMS ultrasonic transducer ，简称MUT ）是采用微 电子和微机械加工技术制作的新型超声换能器。与传统超声换能器相比, MUT 具有体积小、重量轻、成本低、功 耗低、可靠性高、频率控制灵活、频带宽、灵敏度高以及易于与电路集成和实现智能化等特点。是超声换能器的 重要的研究方向之一。MUT 的研究主要包括压电MUT （piezoelectric MUT ，简称PMUT ）和电容MUT （capacitive MUT ，简称CMUT ）两个方面。本文概述了CMUT 研究的发展进程和研究成果，展望了CMUT 的研究和应用前景。 关键词 微机械，电容，超声换能器 中图分类号：TB552 文献标识码：A 文章编号：1000-310X(2012)04-0241-08 Progress in capacitive MEMS ultrasonic transducer LUAN Guidong (School of Electronics Engineering and Computer Science, Peking University, Beijing 100871) Abstract MEMS ultrasonic transducers device (MUT) is a new type of ultrasonic transducer which is the use of microelectronics and micromachining technology to manufacture. Compared with conventional ultrasound transducer, the MUT has the advantage of small size, light weight, low cost, low power consumption, high reliability, flexible control of frequency, frequency bandwidth, high sensitivity and easy with the integrated circuit, and implement intelligent. MUT is one of the important research directions of the ultrasonic transducers. MUT research mainly includes two aspects of the piezoelectric MUT (PMUT) and the capacitive MUT (CMUT). This article provides an overview of the development process and research findings of the CMUT, and future research and application prospects of CMUT. Key words Micro-mechanical, Capaci