螺杆泵胶液分配实验专题研究与胶液挤出理论分析.pdf

ABSTRACT Withthe ofmicroelectronicsin high—speeddevelopment packaging China,the of is tothe technologyaugerpumpdispensingwidelyapplied andcircuit becauseofits chippackaging assembly llighefficiency,high andwide allthe precision ofthe are byforeign augerpumpdispensingsupplied equipments Witll athometherehasbeen companieshighprices．And inadequate researchofthe is ofgreat augerpumpdispensing．Therefore，it doresearchonthis to technology． significance This onaself-build thesis,based augerpumpdispensingsystem，is intendedto adetail aboutthe ofthe give analysis assemblingaugerpump at a controllerfor with designingdriving pump dispensingsystem，aiming accordancetothe of effect requirementssystemassembly．Thedispensing to errors andsubstrate。Inorderto is affectedduethe ofsystem seriously to solvethis a of control waysoftware-compensating problem,weadopt theerrordatafrom fluid checking dispensingprocess，which practical makesthe highlyprecise． system Asthereare variablestoaffectthe effectandthe