电容式加速度计数字化处理电路及与模拟电路比较.pdfVIP

第 22 卷 　第 11 期 传 感 技 术 学 报 Vol . 22 　N o . 11 2009 年 11 月 CHIN ES E J OU RNAL OF S EN SORS AND AC TUA TORS N ov . 2009 A Comparison bet ween Analog and Digital Capacitive Accelerometer L I N Weij un , H U S hich ang , Z H E N G X u d ong , WA N G H ao , J I N Z hong he D ep art ment of I nf orm at ion S cience E lect ronic Eng i neeri ng , Z hej i ang Uni vers ity , H ang z hou 3 10027 , Chi na Abstract :A digit al p roce ssing sy st em ba sed on a cap acitive M EM S accelero met er i s int ro duced . Each p art of t he digit al p roce ssing sy st em i s caref ully analyzed and make s a co mp ari son wit h t he analo g p roce ssin g sy s t em . Re st rictin g f actor s of bot h analo g and digit al accelero met er sy st em s are given . The t e st re sult of t he digit al accelero met er sy st em t ur n s out t hat t he bia s st abilit y i s 02 1 m gn ,five time s bet t er t han t he analo g accelero met er sy st em ( 102 m gn ) . The noi se of t he digit al accelero met er sy st em i s reduced to t wo fift h s co mp ared wit h t he analo g accelero met er sy st em . All t he re sult s in dicat e t he great imp rovement of t he digit al accelero met er sy st em ,and t he rea son of t he imp rovement i s due to t he advanced demo dulation algorit hm being app lied w hich re sult s in a higher SN R and a lower p ha se noi se . Key words :M EM S ;accelero met er ;DD S ; F P GA ;p ha se noi se EEACC :7230 ;7320 E 电容式加速度计的数字化处理电路 及其与模拟电路的比较 林伟俊 ,胡世昌,郑旭东 ,王 　昊 ,金仲和 浙江大学信息与电子工程系 ,杭州 3 10027