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P-型氧化铜薄膜测氢.pdf

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Sensors and Actuators B 146 (2010) 239–244 Contents lists available at ScienceDirect Sensors and Actuators B: Chemical j o u rn al h omepage: w w w. elsev /locate/snb Synthesis of p-type semiconducting cupric oxide thin ﬁlms and their application to hydrogen detection Nguyen Duc Hoa, Sea Yong An, Nguyen Quoc Dung, Nguyen Van Quy, Dojin Kim ∗ Department of Materials Science and Engineering, Chungnam National University, 220 Gung-dong, Yuseong-gu, Daejeon, Republic of Korea a r t i c l e i n f o a b s t r a c t Article history: Nanostructured CuO thin ﬁlms are synthesized by deposition and thermal oxidation of Cu on SiO2 sub- Received 18 November 2009 strates. The effects of oxidation temperatures on the morphologies and crystallinity of the CuO thin ﬁlms Received in revised form 28 January 2010 are investigated by SEM, XRD, and XPS. The electrical and hydrogen sensing properties of CuO are stud- Accepted 12 February 2010 ied by electrical resistance measurements. In addition, the effects of carrier gases on the gas response Available online 19 February 2010 of CuO are investigated. The results showed that Cu was oxidized into monoclinic cupric oxide in the investigated temperature range from 300 to 800 ◦ C. The p-type semiconducting CuO thin ﬁlm showed Keywords: ◦