梯度掺杂和纳米多层调制类金刚石薄膜摩擦学性能.pdfVIP

第 23 卷 第 2 期 中 国 表 面 工 程 Vol.23 No.2 2010 年 4 月 CHINA SURFACE ENGINEERING April 2010 50 中 国 表 面 工 程 2009 年 doi: 10.3969/j.issn.1007−9289.2010.02.007 梯度掺杂和纳米多层调制类金刚石薄膜的摩擦学性能* 陈新春，彭志坚，付志强，王成彪 （中国地质大学北京工程技术学院，北京 100083 ） 摘 要：采用阴极电弧结合离子源辅助磁控溅射复合技术，充分利用薄膜组成多元化、晶体纳米化、组成和结构多层 化、梯度化的优势，分别制备了多元素复合过渡层缓冲的钨元素梯度掺杂的和 Cr 元素纳米多层调制的类金刚石 （DLC ） 薄膜，研究掺杂元素含量和调制层厚度对薄膜组成与结构、力学性能和摩擦磨损性能的影响。梯度掺杂、多元、多层 结构降低了 DLC 膜和钢基体之间因组成和结构不同产生的应力，改善了膜基结合力，材料综合耐磨损性能大幅度提高。 关键词：复合镀膜技术；DLC 薄膜；掺杂；摩擦学性能 中图分类号：TG115.58 文献标识码：A 文章编号：1007–9289(2010)02–0036–06 Tribological Properties of Graded Metal–doped and Nanoscale Multilayered Modulation Diamond-like Carbon Films CHEN Xin–chun, PENG Zhi–jian, FU Zhi–qiang, WANG Cheng–biao (School of Engineering and Technology, China University of Geosciences, Beijing 100083) Abstract: Graded tungsten–doped diamond–like carbon (DLC) composite thin films and nanoscale multilayered chromium modulated DLC composite thin films with multicomponent transition layers were fabricated, respectively, by using cathodic vacuum arc and ion beam assisted DC magnetron sputtering technique, and the influences of the doped amount of metal W and the individual thickness of Cr modulation layer on the composition, structure and properties of the as–prepared DLC film samples were investigated. It was found that the adhesion strengths between the films and substrates of both kinds of samples were dramatically enhanced due to the alleviation of their intrinsic compressive stresses through multicomponent and multilayered structure, and the comprehensive wear–resistant properties of the as–prepared samples were o