晶体生长软件FEMAG在蓝宝石生长工艺中应用.ppt

* Upper pictures show the temperature distribution and the solidification interface for different time, it is not a dynamic simulation but steady simulation at different time, the dynamic simulation mode is not yet available but will be in the next release this year. Lower pictures show the corresponding melt flow, the color is related to the velocity amplitude, it possible to show the velocity vector and the streamline using Paraview * Because it a crystal, the stress is different depending the orientation of the crystal structure (A axis or C axis). We calculate the stress (as a postprocessor, after the temperature calculation) for different orientation (see the next slide). The stress for FEMAG-CZ/OX is also available. * * * CONFIDENTIAL Anisotropic Thermal Stress (HEM Sapphire C-axis) FEMAG-HEM quasi-steady simulation of the growth of a Sapphire crystal: 3D von Mises invariant isovalues (Pa) FEMAG-HEM Example CONFIDENTIAL FEMAG-OX to simulate CZ and Kyropoulos is available FEMAG-HEM to simulate HEM process is available Advanced radiation model Very efficient ( Parallel Software) Efficient melt flow calculation (laminar simulation) Thermal Stresses (A-axis, C-axis) Sapphire Growth Simulation - Conclusion CONFIDENTIAL Very fast solver – less than one day to simulate a case Very accurate models Boundary Layer Mesh is unique and mandatory to capture the interface position Support service is very high standards, reactive and always ready to help 25 years of experience with international recognition Sapphire Growth Simulation / Unique features of FEMAGSoft * * * * * * * * On the left: temperature distribution in all the furnace (sapphire, crucible, heater, ….) On upper right : velocity in liquid part of the sapphire On lower right : the thermal stress in the crystal depending the orientation of the crystal (A-axis, C-axis) * * * * The FEMAG software are global. You see examples: Left : a HEM furnace to growth sapphire, each part of the furnance is co