4H-SiC肖特基微型同位素电池.pdfVIP

MEMS器件与技术 MEMSDeviceTechnology 4H-SiC SchottkyBetavoltaicM icroBattery GaoPeng，LiXiaoying，QiaoDayong，YaoXianwang，ZangBo (M icroandNanoElectromechanicalSystemsLaboratory， NorthwesternPolytechnicalUniversity，Xian 710072，China) Abstract：A semiconductor betavoltaicbattery providesa good solution to power supply of MEM Sintermsofitslong lifetime，easyintegrationandhigh environmentaladaptability．W ith