低能C36团簇金刚石表面纳米薄膜沉积机理的研究.pdf

TB43 621.94 C36 2006 6 Classified Index TB43 U.D.C. 621.94 Dissertation for the Mater Degree of Engineering STUDY ON LOW-ENERGY C36 CLUSTER NANO-STRUCTURED FILMS DEPOSITION MECHANISM ON DIAMOND SURFACE Candidate Yuan Yijie Supervisor Prof. Li Dan Associate Supervisor Prof. Chen Mingjun Academic Degree Applied for Master of Engineering Speciality Mechanical Manufacturing and Automation Affiliation School of Mechanical and Electrical Engineering Date of Defence June , 2006 Degree-Conferring-Institution Harbin Institute of Technology 1985 C60 1998 Zettl C36 C36 CurvatureC60 LEBCD Brenner-LJ Brenner-LJC36 C36 C36 100C36 10030∼70eV 0∼20°30∼60eVC36