A high precision profilometer based on vertical scanning microscopic interferometry.pdfVIP

维普资讯 JShanghaiUniv(EnglEd)，2008，12(3)：255—260 DistalObjectIdentifier(DOI)：10．1007／s11741—008—0312—2 A high precision profilom eterbased on verticalscanning m icroscopic interferom etry DAIRong(戴 蓉)，-，XIETie-bang(谢铁邦)，GONGweln(龚 ．文)。，CHANGSu-ping(常素萍) 1．SchoolofMechanicalScienceandEngineering，HuazhongUniversityofScienceandTechnology， W uhan430074，P．R．China 2．SchoolofMechanicalandElectronicEngineering，W uhanUniversityofTechnoloyg ，W uhan430070，P．R．China Abstract A profilometerused for3dimensionmeasurementofmicro-surfacetopography ispresented．Theinstrumentis basedonthevertic