Sol_甩膜法制备钛酸钡薄膜及其微观形态的SPM研究.pdfVIP

25 4 Vol. 25 No. 4 2008 12 Journal of the H ebei Academy of Sciences Dec. 2008 : 1001- 9383( 2008) 04- 0041- 04 So-l SPM 1 1 1 2 申玉双 , 杨芙丽 , 许新芳 ,翟学良 (1., 050026; 2., 050016) :采用溶胶- 凝胶( So-l Gel) 法合成稳定的前驱体溶液, 在单晶硅( 100) 用甩膜法制得了均匀致密的 钛酸钡薄膜, 利用差热- 热重( DTA-T GA) 技术分析了钛酸钡( BT) 干凝胶的热演化过程, 首次用电子探针显 微镜( SPM) 之原子力显微镜( AFM) 直接地从三维的角度观测了钛酸钡薄膜微观形成过程, 并用XRD 技术跟 踪了薄膜加热过程中物相的变化情况, 得到了薄膜生长的基本信息, 最终制得了表面光滑的钛酸钡薄膜, 晶 粒大小在50- 70nm 之间最佳煅烧温度为700 : 无机非金属材料; 钛酸钡薄膜; 甩膜法; 扫描探针 :TB 321 :A Morphology studies of So-l spin-coating synthesis derived BaTiO3 thin fil s by SPM 1 1 1 2 SHENYu- Shuang , YANG Fu- Li , XU Xin- Fang , ZHAI Xue- Liang ( 1. Ch emical E ngineer ing Dep artment, H ebei Ch emical P harmace utical Vocational T echnolog y Colleg e, Shij iaz huang H ebei 050026, China; 2. E p eriment Centr e, H e bei N or mal Univ er sity , Sh ij iaz huang H ebei 050016, China) Abstract:BaTiO3 ( BT ) thin films w ere prepared on Si( 100) substrates by the sol-spin-coating tech- nique w ith stable precursor solution. T he thermolysis processes of BT-gel w as analyzed by differential thermal analysis and thermogravimetry analysis ( DTA-TGA) . And for the first time w e investigated the growing process of the ceramic films clearly from Three Dimensions by advanced Atomic Force M i- croscopy ( AFM) w hich is one microscopy of Scanning probe M icroscope ( SPM) . And the effects of heating on phase formation w ere investigated by XRD. In this w ay , the uniform and densified barium titanat