一种标定三角测量法激光位移计的方法.pdfVIP

3 No . 3 1997 5 OPT ICAL T ECHNOLOGY May. 1997 任伟明　孙培懋　王亚雷　朱　昊 ( , 100084) : , , , , , , , : A Calibration Method f or Laser Displacement System Based on Triangulation Ren WeimingSun PeimaoWang YaleiZhu Hao ( De artment of Precision Instrum ents, Tsinghua University , Beijing 100084, P . R. China) Abstract: In triangulation formula the relation between t he de endent variable, inde endent vari- able and system construction arameters is nonlinear, and the values of t hese aramet ers can not be . . measured accurately So it is difficult to calibrat e t he laser dis lacement syst em In this a er tw o aux- iliary variables and tw o com osite arameters are set to linearize the relation. According t o this linear relation the accurate values of these tw o aramet ers can be a roximated w ith Least Square Method, as . a consequence t he laser dis lacement syst em can be calibrated accurately In the a roximat ion rocess the o tical system aberrat ion effect on t he a roximating results can be eliminat ed artially by correct- ing the measured value of inde endent variable, and sur lus is reduced. T he ex eriment results using this calibration method are described. : , , Keywords triangulation laser dis lacement measurement data a roximation X ` õL X = ( 1)