晶体生长模拟软件FEMAG之浮区法.ppt

晶体生长模拟软件FEMAG之浮区法 Roman Rolinsky2, Nathalie Van den Bogaert2, Michael Wünscher3, David Despas1, Arnaud de Potter2, Fran?ois Dupret1,2 1 CESAME Research Center Université catholique de Louvain, Belgium 2 FEMAGSoft S.A., Belgium 3 Leibniz Institute for Crystal Growth (IKZ), Berlin, Germany + 32 10 22 64 52 info@ FEMAGSoft ? 2011 Quasi-steady simulation of the growth of a 100 mm silicon crystal (1mm/min pull rate) Global temperature field (left), melt flow (right), and alternating magnetic field (bottom) Introduction FEMAGSoft ? 2011 Quasi-steady thermal equilibrium