Status of the MEMS Research,.docVIP

Status of the MEMS Research, Development, and Industry in China Qing-An Huang Key Laboratory of MEMS of the Ministry of Education Southeast University, Nanjing, China 黄庆安 东南大学 Southeast University  Content pNational Research and Development System Brief introduction to the national research and development plan of China. pMEMS under the Hi-Tech Development Plan The research, development, and progress of MEMS under the framework of the Hi-Tech Development Plan of China (863 plan). pChina MEMS Industry Development Brief introduction to MEMS industry development in China. pConsiderations for the next 5 five years Preliminary ideas for the next 5 years under the framework of the Hi-Tech Development Plan of China (863 plan). Southeast University  National Research and Development System of China Fundamental research The National Nature Science Foundation of China 8 Departments MEMS began in 1989 The Major State Basic Research Program of China (973 plan) 13 Programs MEMS began in 1998 bridge The Hi-Tech Development Plan of China (863 plan) 10 areas (51 programs) MEMS began in 2000 The National Key Technology R D Program (Supporting Plan) 11 areas Very limited MEMS projects The National Science and Technology Major Project 17 areas MEMS began in 2011(very limited) Commercialization development  MEMS under the Hi-Tech Development Plan(863) (2001-2015) Number of Supported Projects Funding (RMB) Years 2001-2005 2006-2010 2011-2015 98 171 45 173 Millions 210 Millions 320 Millions 703 Millions Total 15 years 314  MEMS under the Hi-Tech Development Plan Key Technologies and Platforms MEMS Devices MEMS Systems ? Modeling Design Tools ? Front-End Manufacturing Technologies ? Packaging Technologies ? Characterization Test ? Reliability ? Pressure sensors ? Accelerometers ? Gyroscopes ? Microphones ?