高g值微机械加速度传感器的现状与发展.pdfVIP

29 4 Vol1 29 No14 2008 4 Chinese JournalofScientific Instrument Apr. 2008 g * 1, 2 2 2 1 李世维 , 王群书 , 古仁红 , 刘君华 ( 1 710049; 2 710024) : g g g, , g g : ; g; ; : TP212 : A : 460. 4020 Situation and trend of high-g m icromachined accelerometer 1, 2 2 2 1 LiShwi ei , Wang Qunshu, Gu enhong , Liu Junhua (1 School of E lectricialEng ineering, X ican Jiaotong University, X ican 710049, Ch ina; 2 N orth est Institute of N uclear Technology, X ican 710024, China) Abstract:This paper provides a perspective review on the development of high g accelerometers, particularly them-i cromachined ones, applied in themeasurement of earth-penetratorweapons and explosive field. Some typicalhigh gp-i ezoresistive and capacitivem icromachined accelerometers are described, including their physical principles, perform- ance requirements and structures of the sensing elements. Several new m aterials used in the sensing elements of m-i cromachined accelerometers and their processing methods are discussed. Their future developments are envisioned. Key words: accelerometer; high-g; explosion and mi pact; m icromachined g , 1 , g g(g) , 2 g , g [ 1-2] , g g , , 3 [ 3] , g , : 2007-04 eceived Date: 200