VCA Direct-Drive High Speed and Precision XY Table.pdfVIP

维普资讯 TransactionsofU~mjinUniversity ISSN1006—4982 pp398—404 V0I．13 No．6 Dec．2O07 VCA Direct-DriveHighSpeedandPrecisionXY Table ZHA0Xingyu(~ t,)，FENGxi砌nei(冯晓梅)，ZHANGDaWei(张大卫) (1．SchoolofMechanicalEngineefing，TianjinUniversity，Tianjin300072，China； 2．SchoolofMechanicalEngineering，MilitaryTraflqcInstitute，Tianjin300161，China) Abstract：lnordertocompensateforthelimitationofconventionalXYtableusedinsemiconductorin— tegratedcircuitsfIC)packagingandimproveitsspeedandaccuracy，avoicecollactuator(VCA) direct—drivehigh—speedandprecisionpositioningXYtableusedinwirebonderwasproposed．Also． anovelflexibledecouplingmechanism wasusedinthepositioningtable．andthesmalImovingmass enabledthepositioningtabletomoveathighspeedandprecision．XYtabledeformationintererence caused by assembly errorand nstant}ntefference generated by dynamic load moving with high speedandaccelerationcanbeeliminatedthroughtheflexibledecouplingmechanism ．Considering thepositioningtableaslumpedmassspringsystem ，thedynma icequationsofthemechanicalsys- tem andtheVCAwerebuiltaccordingtotheNewtonmechanicsprincipleandelectromagnetictheo- ry．Thentheelectromechanicalcouplingcontrolmodelofthesystem wascreatedthroughLaplace transfOrm ．BasedondisplacementPID controller，theloop—lockedcontrollingalgorithm oftheposi— tioningsystem wasinvestigated．Thedynma iccontrolalgorithm effectivelyimprovedthesystem dy— nma icperformance．Theprecisiontestoftheprototypemachinewascarriedout，andtheresultsval- idatedthecorrectnessofthemodelandthetheow ．ComparedwithtraditionalXY table，thetable hashigherspeed，accelerationandpositioningaccuracy． Keywords：×Y table；voicecollactuator(VCA)；decouplingmechanism；e