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Proceedings of the 2001 IEEE nternational Conference on Robotic;s Automation Seoul, Korea - May 21-26, 2001 3D Nanorobotiic Manipulations of Multi-Walled Carbon Nanotubes Lixin DONG*, Fumihito ARAI*, and Toshio FUKUDA** *Department of Micro System Engineering, Nagoya University **Center For Cooperative Research in Advanced Sci. and Tech., Nagoya University Furo-cho, Chikusa-ku, Nagoya 464-8603, JAPAN dong@robo.mein.nagoya-u.ac.j p, arai@mein.nagoya-u.ac.j p, fukuda@mein.nagoya-u.ac.j p Abstract: Multi-walled carbon nanotubes (MWNTs) are manipulated in 3D space with a 10-DOF nanorobotic manipulator, which is actuated with PZTs and PicomotorsTM(New Focus Inc.) and operated inside a scanning, electronic microscope (SEM). The coarse linear resolutions of the manipulator are better than 30nm (X, Y, Z stages actuated by Picomotors) and the rotary one 2mrad, while the resolutions of fme motions (actuated by PZTs) are within nano-order. AFM cantilevers are used as the end-effector. Several kinds of manipulations of MWNTs are performed with the developed manipulators in the assistance of dielectrophoresis and van der Waals forces. A single MWNT with estimated dimensions of Φ40nmx7pLm has been picked up on an AFM cantilever. Another +50nmx6pm MWNT is placed between two cantilevers, and still another 040nmx8U,m MWNT is bent between a cantilever and sample substrate. Carbon nanotube (CNT) junctions are basic building blocks for more complex devices based on CNTs. A cross-junction was constructed with two MWNTs of dimensions of ~Φ40nm×6um and ~Φ50nm×7um, and a T-junction was made of two MWNTs with the dimensions of ~Φ40nm×3um.Force measurements are performed and the flexural rigidity and Youngs Modulus of an ~Φ30nm×7um MWNT are estimated to be 8.641×l0-20Nm2 and 2.17TPa respectively. Such manipulations are essential for both the property research of CNTs and the fabrication of CNT-based NEMS. Key words: 3D nanorobotic manipulations, CNTs, MWNTs, AFM canti