准分子激光在不同气氛下辐照氧化锌薄膜和其辐照后薄膜性质的变化.pdfVIP

准分子激光在不同气氛下辐照氧化锌薄膜及其辐照后薄膜性质的变化 曾勇，赵艳，蒋毅坚 北京工业大学激光工程研究院，北京 100124 摘要：我们研究了使用准分子激光在不同气氛条件下（空气，氧气，氮气）辐照氧化锌薄膜后薄膜的荧 光、电学性质的变化。无论在哪种气氛环境下进行辐照，与原始生长的薄膜比较，辐照后的薄膜都表现 出一系列显著的变化：载流子浓度上升了两个数量级，载流子迁移率上升了两个数量级，电阻率下降了 三个数量级，紫外发光峰强度明显下降并伴有轻微红移。为了更进一步研究准分子激光与氧化锌相互作 用的机制，我们研究了薄膜变温荧光光谱的变化。从变温荧光光谱中我们发现，与原始生长的薄膜相比， 辐照后的薄膜缺失了位于3.274 eV 的D0 0 X-1LO 和3.203eV 的D X-2LO 发射峰，而且这两个峰合并成了 一个峰。通过退火处理，霍尔效应测试和荧光光谱分析，我们讨论了准分子激光与氧化锌薄膜相互作用 的机制。 关键词：激光与材料相互作用及应用；氧化锌薄膜；荧光光谱；电学性质 The modification of ZnO thin films induced by Excimer laser irradiation under different atmospheres Zeng Yong ，Zhao Yan ，Jiang Yi-jian Institute of Engineering, of , 100022 Abstract: In this paper, we want to show the photoluminescence (PL) properties, electric properties of ZnO thin films which were irradiated by KrFexcimer laser under different atmospheres (air, oxygen, nitrogen). After laser irradiation (no matter whatever atmosphere), compared with the as-prepared thin films, the irradiated thin films exhibit a series of visible properties: resistivity is decreased by three orders of magnitude, carrier concentration is increased by two orders of magnitude, UV emission is obviously lower and a little red-shift, and the visible region change very much. To further understand the mechanism of interaction between KrFexcimer laser and zinc oxide, temperature-dependent photoluminescence is employed. From the temperature-dependent PL, compared with the as-prepared samples, it show that the irradiated thin films 0 0 0 missed D X-1LO and D X-2LO transitions, on the other hand, these two D X transitions,3.32eV and 3.333eV, are merged into o