离子镀钛_离子注氮复合法制备太阳光选择性吸收膜_牛继南.pdfVIP

32 7 机 械 工 程 材 料 Vol. 32 No. 7 2008 7 M aterials for M echa ical E gi eeri g Jul. 2008 - , ( 中国矿业大学材料科学与工程学院, 江苏徐州221116) : 利用离子镀钛膜后在60 kV+ 50 kV+ 40 kV+ 30 kV+ 20 kV + 10 kV 六级氮离子注 入 复合方法在铝表面制备出了渐变型太阳光选择性吸收膜层; 对制备 膜进行了反射率测量, 并 由此计算了太阳光谱吸收率; 同时测量了膜 热发射率; 用扫描电镜观察了膜表面形貌, 用 XPS 光 电子能谱仪对膜层进行了表层分析, 并用俄歇能谱仪分析了元素纵向分布结果表明: 氮离子六级 注入后膜 太阳光吸收率高达99. 66%, 其热发射率为0. 31, 膜层中钛氮和铝 相互扩散造成膜 热发射率偏大, 而膜层表面生成 TiO2 T iN 和碳单质等有利于减少热能 损耗; 氮元素在膜层 中呈梯度分布, 这有利于对太阳光 吸收 : 多级离子注入; 离子镀; 太阳光吸收性 : T G156. 8 : A : 1000-3738(2008) 07-0041-05 Preparation of Solar Selective Absorbi ng Coating by Ion Plating of Ti tanium and Ion Implantation of Nitrogen Compound Method NIU J-i nan QIANG Ying-huai ( U iversity of Mi i g a d T ech ology , Xuzhou 221116, Chi a) Abstract: 60 kV+ 50 kV+ 40 kV+ 30 kV+ 20 kV+ 10 kV six-grade-impla tatio of itroge io s i T i film deposited by io plati g o pure Al surface was used for prepari g solar selective absorbi g coati g. The reflectivity to solar spectrum of the prepared coati g w as measured a d absorbtivity w as calculated accordi g to it. A d thermal em issivit y of the coati g were also measured. The surface morphology was observed w ith SEM, a d XPS w as used to study the surface compositio of the coati g. The results show ed t hat the absorptivity of the sample w as as high as 99. 66% a d the thermal emissivity w as 0. 31. The mutual diffusio of Ti, N a d Al caused the emissivity of the sample a litt le high. TiO , T iN a d pure C etc ge erated i the most out surface w ere propitious to reduci g heat 2 loss; Auger a alys is show ed that N io co ce tratio w as gradie t desce t f rom the most out surface to alum