Semiconductor Manufacturing Processes.ppt

Semiconductor Manufacturing Processes Index Overview Overview Course Overview Course Overview Index Chip manufacturing: Snap shot Scope What will / will not be covered (and to what extent) What will / will not be covered (and to what extent) References Index INTRODUCTION INTRODUCTION Schematic Process Classification General Process Grouping General Processes Grouping Process Classification Course Outline General Information General Information General Information Processes Chip Xsection- Simplified Schematic Chip - Simplified Schematic Chip - Simplified Schematic Intel 7 metal SEM (90 nm node) IBM, multi level copper wiring FEOL Processes BEOL Processes Appendix Acronyms Acronyms Acronyms Shape Definition Photo Lithography Modification Ion Implantation Diffusion Rapid Thermal Anneal (RTA) Oxidation Deposition Chemical Vapor Deposition (CVD) Physical Vapor Deposition (PVD) Removal Chemical Mechanical Polishing (CMP) Etching Shape Definition Photo Lithography Modification Anneal Deposition Chemical Vapor Deposition (CVD) Physical Vapor Deposition (PVD) Electrochemical Deposition Removal Chemical Mechanical Polishing (CMP) Etching * * Micro Electronics Fabrication Overview Relevance, compare with traditional ChemE process Opportunities Course Overview Goal, what is expected of you Quiz, assignment etc Scope Outline of the course, what is covered, what is not References Introduction Relevance: Used everywhere Fairly expensive (computers) to very cheap (watch) How is it similar to / different from ‘traditional ChemE’ process? Basic Principles are same Level of control needed is very high Individual features are small, but volume is high Need to be aware of electrical properties/behavior Developing field (processes not always ‘mature’) Short cycle time Not prevalent in India == lower exposure Job opportunities: Semiconductor Complex Limited (SCL) in Chandigarh DRDO/ISRO, BEL Research Abroad: Very Active