硅粉粒径对反应烧结多孔氮化硅陶瓷介电性能的影响_英文_徐洁.pdfVIP

第35 卷第7 期 硅 酸 盐 学 报 Vol. 35 ，No. 7 2 0 0 7 年 7 月 JOURNAL OF THE CHINESE CERAMIC SOCIETY J u l y ，2 0 0 7 硅粉粒径对反应烧结多孔氮化硅陶瓷介电性能的影响 徐 洁，朱冬梅，罗 发，周万城 (西北工业大学，凝固技术国家重点实验室，西安 710072) 摘 要：以硅粉为原料，添加质量分数为30%的成孔剂(苯甲酸)球形颗粒，反应烧结制备了气孔率为55%，具有球形宏观孔的低密度多孔氮化硅陶瓷。 研究了硅粉粒径对反应烧结多孔氮化硅陶瓷介电性能的影响。结果表明：烧结后样品的介电常数 ε′和介电损耗 tanδ 随着初始硅粉粒径的减小都有明 显的降低。平均颗粒尺寸为7 μm 的硅粉制备的样品的ε′最小，约为2.5 。原料硅粉的粒径变化将影响反应烧结的反应速率，从而影响反应烧结后样品 的生成相和微观结构。随着平均颗粒尺寸的减小，反应烧结后Si N 相含量增加，Si ON 相和游离硅含量减少，气孔变小。 3 4 2 2 关键词：多孔氮化硅陶瓷；反应烧结；硅粉；粒径；介电性能 中图分类号：TQ174 文献标识：A 文章编号：0454–5648(2007)07–0848–04 EFFECT OF THE PARTICLE SIZE OF RAW SILICON POWDER ON THE DIELECTRIC PROPERTIES OF POROUS REACTION-BONDED SILICON NITRIDE CERAMICS XU Jie ，ZHU Dongmei ，LUO Fa ，ZHOU Wancheng (State Key Laboratory of Solidification Processing，Northwestern Polytechnical University, Xian 710072, China) Abstract: Low density silicon nitride with about 55% porosity and globed macropores was prepared by reaction-bonded raw silicon powder and adding 30% in mass pore-forming agent of benzoic acid ball-like particles. Effects of the particle size of raw silicon powder on the dielectric properties of reaction-bonded porous silicon nitride were investigated. The results clearly indicate that the specimens prepared with fine powders have lower dielectric constant ε′and dielectric loss tanδ than that prepared using coarse pow- ders. The ε′ of the specimen prepared by the silicon powder with a minimum average particle size of 7 μm is the lowest, about 2.5.