严格耦合波方法计算立体正弦光栅衍射效率.pdfVIP

: 22 56 2012 33 2 LASER JOURNAL(Vol. 33. No. 2. 2012) 陈 刚, 孙 可, 刘 浩 ( 南京信息职业技术学院微电子学院, 江苏 南京 210046) : , Matlab , , , ; : ; ; ; ; :O436. 1 :A :0253- 2743(2012) 02- 0022- 03 Calculation of the diffraction efficiency of solid sinusoidal ratin s with the ri orous coupled wave method CHEN Gang,SUN Ke,LIU Hao ( Fac lty of Microelectronics, Nanjing College of Information Technology, Nanjing, Jiangs 210046, China) Abstract:In order to st dy the diffraction of amplit de gratings, rigoro s co pled- wave method was sed to establish a calc lation model of solid sin soidal gratings. Calc lation of diffraction efficiency was programmed in matlab software, and amplit de and phase distrib tion aro nd the grating area were also sim lated. The res lts indicated that the solid model was different from planar sin soidal gratings in diffraction efficiency, which was related to period and thickness of the gratings. The diffraction efficiencys were close in certain conditions. Key words:sin soidal gratings;diffraction efficiency; rigo so s co pled wave method; calc lation 1 1 2P t = + cos( x) (1) 2 3 + , , 112 , + , 112 3 , 0 25%, ? 1 2.78%; , n2 , n = B+ Aj (2) 12- 42 152 16- 112 2 , C , K