FEMAG晶体生长建模软件如何将直拉法模拟技术拓展到区熔法生长.pptVIP

FEMAG晶体生长建模软件 --How to extend Cz modeling techniques to FZ growth?;FEMAGSoft ? 2013;Turbulent viscosity is low and the melt flow can be computed by means of a laminar model.;Induction heating;Induction Heating in FZ semi-conductor growth ;;Numerical results;Real part of magnetic flux;Difficulties;FEMAGSoft ? 2013;? Development of a mathematical model of the electromagnetic field distribution in planar and axisymmetric configurations;;Flow and temperature calculations are performed with a 200 mm diameter crystal. The melt viscosity is set to 5 times the actual silicon viscosity to obtain steady results.;Temperature field and isolines of the norm of the magnetic flux function.;With equivalent magnetic tangential stress.;FEMAG-FZ quasi-steady simulation of the growth of a 200 mm silicon crystal;Model validation;Crystal radius: 51 mm Feed rotation rate: 15 RPM Crystal rotation rate: (a) 5 RPM, (b) 10 RPM, (c) 15 RPM Marangoni coefficient: 1.0 10-4 N/mK;FEMAGSoft ? 2013;FEMAGSoft ? 2013;FEMAGSoft ? 2013;FEMAGSoft ? 2013;FEMAGSoft ? 2013;FEMAGSoft ? 2013;FEMAGSoft ? 2013;FEMAGSoft ? 2013;FEMAGSoft ? 2013;FEMAGSoft ? 2013;FEMAGSoft ? 2013;FEMAGSoft ? 2013;FEMAGSoft ? 2013;;FEMAGSoft ? 2013;Free interface constraining loci (secondary mesh) in FZ growth;FEMAGSoft ? 2013;FEMAGSoft ? 2013;FEMAGSoft ? 2013;FEMAGSoft ? 2013;FEMAGSoft ? 2013;A first quasi-steady simulation is performed with fixed OMF and melt-gas interface;FEMAGSoft ? 2013;FEMAGSoft ? 2013;FEMAGSoft ? 2013;FEMAGSoft ? 2013;FEMAGSoft ? 2013;FEMAGSoft ? 2013;FEMAGSoft ? 2013;;FEMAGSoft ? 2013;FEMAGSoft ? 2013