FEMAG晶体生长模拟软件模拟策略.pptVIP

FEMAG晶体生长模拟软件-建模策略 Fran?ois Dupret1,2, Roman Rolinsky2, Brieuc Delsaute2, Rajesh Ramaya2, Nathalie Van den Bogaert2 1 Université catholique de Louvain, Louvain-la-Neuve, Belgium 2 FEMAGSoft S.A. company, Louvain-la-Neuve, Belgium FEMAGSoft ? 2013 How to improve the growth process in terms of: crystal quality ? process yield ? energy consumption ? production rate ? Introduction Main difficulties: FEMAGSoft ? 2013 Multi-physics: heat and mass transport in the melt and the gas, turbulence, radiation transfer, etc., all interact and strongly affect species incorporation and defect formation in the crystal Multiple space scales: sharp diffusive, viscous, radiative and thermal boundary layers are present in the melt and the gas, together with complex defect boundary layers in the crystal Multiple time scales: typically the growth process is very slow while the melt flow is governed by much shorter time constants Introduction (cont’d) FEMAGSoft ? 2013 Solving these problems requires … To resort to appropriate and up-to-date numerical simulation techniques to couple and solve these models → quasi-steady and dynamic models To develop a sound physical model for each separate effect → global and time-dependent modeling of heat transfer, turbulence modeling, defect modeling, … Introduction (cont’d) FEMAGSoft ? 2013 Principal objective has been to complete the platform FEMAG-2 → FEMAG-3 software generation transition taking place from 2008-2009 General objective of FEMAGSoft → strongly improved platform in terms of computation time, memory, etc. Introduction (cont’d) FEMAGSoft ? 2013 b) Time-dependent modeling: use of various simulation modes (ex: quasi-steady, quasi-dynamic, inverse or direct dynamic models in Cz growth) c) FEM discretization: use of 2D, Spectral 3D, Cartesian 3D,… models (high geometrical flexibility, simple assembling technique) a) Global modeling: subdivision of the furnace into “macro-elements” (solid or liquid constituents, radia