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Ultramicroscopy 50 (1993) 255-262 ult ramicroscopy
North-Holland
Assessment of specimen noise in HREM images
of simple structures
S. Paciornik ‘, R. Kilaas and U. Dahmen
National Center for Electron Microscopy, MSD, Lawrence Berkeley Laboratory, Uniuersiry of California, Berkeley,
CA 94720, USA
Received 28 January 1993; in final form 3 June 1993
Displacements of image spots representing atomic columns in a high resolution image may be due either to displacements
of atomic columns or to specimen noise. The effect of specimen noise on the accuracy with which an atomic column can be
located is assessed by evaluating the root mean square deviation of the intensity center of mass of image dots. Optimized
methods for experimental assessment of this effect are developed and applied to simulated and experimental images.
1. Introduction images with images simulated from different
models. The best fit is normally determined visu-
High resolution electron microscopy (HREM) ally, although more quantitative methods of com-
is a primary tool for studying the atomic structure parison and refinement have been employed for
of defects in crystals. However, the quantitative perfect crystals [l] and more recently for defects
analysis of defect structures is seriously limited by PI.
specimen noise due to contamination or
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