Modeling and Design Optimization of LargeDeflection Piezoelectric Folded Cantilever Microactuators.pdfVIP

ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 53, no. 1, january 2006 237 Correspondence Modeling and Design Optimization of Large-Deflection Piezoelectric Folded Cantilever Microactuators Huajun Fang, Litian Liu, and Tianling Ren Abstract—This paper presents a novel, large-deflection piezoelectric folded cantilever microactuator (PFCM). A multimorph model for the large-deflection PFCM is de- rived, in which unified formulas for deflection