Modeling and Design Optimization of LargeDeflection Piezoelectric Folded Cantilever Microactuators.pdfVIP

ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 53, no. 1, january 2006 237 Correspondence Modeling and Design Optimization of Large-Deflection Piezoelectric Folded Cantilever Microactuators Huajun Fang, Litian Liu, and Tianling Ren Abstract—This paper presents a novel, large-deflection piezoelectric folded cantilever microactuator (PFCM). A multimorph model for the large-deflection PFCM is de- rived, in which unified formulas for deflection angle and vertical displacement of N-level PFCM are obtained. Based on the model, multilayer PFCMs using PZT film are de- signed and optimized. The large-deflection PFCM is exten- (a) sively applicable to micro-devices or microsystem applica- tions such as micro-optical switches, microelectromechani- cal systems (MEMS) scanners, and so forth. I. Introduction ith the development of microsystem technology, Wlarge-scale mixed integrated processes combined with contemporary IC technology are developed for batch fabrication of microsystems containing actuators and sen- sors. Several actuation principles have been proposed and applied, such as electrostatic, thermoelectric, electromag- netic, and piezoelectric, among which piezoelectric actua- tion has been paid more attention recently in the microsys- (b) tem field due to the potential advantages of large actuation Fig. 1. (a) Two-level PFCM structure. (b) Three-level PFCM struc- force, accurate displacement, low power, and simple struc- ture. ture. Several piezoelectric materials and actuation struc- tures have been explored to obtain large actuation dis- is derived. With the unified model, a PZT-ba