纳米厚度薄膜外差椭偏测量技术的研究_邓元龙.pdfVIP

313 Vol. 31 No. 3 2 0 0 5 5 OPTICAL TECHNIQUE May 2005 : 1002- 1582(2005) 03-0391-03 * 纳米厚度薄膜外差椭偏测量技术的研究 1, 2 1 2 2 1 邓元龙 , 姚建铨 , 阮双琛 , 孙秀泉, 王鹏 ( 1. , 3000 2; 2. , 518060) : , 20kHz , 0. 1b, , , , : ; ; ; ; ; : TH 44. 3 : A Study of heterodyne ellipsometry for nanometer film measurement 1, 2 1 2 2 1 DENG Yuan- long , YAO Jian-quan , RUAN Shuan-chen , SUN Xiu_quan , WANG Peng ( 1. Institute of Laser Opto-electronics Engineering, College of Precision Instrument, Tianjin Univ. , Tianjin 3000 2, China) ( 2. School of Engineering Technology, Shenzhen University, Shenzhen 518060, China) Abstract: Combining optical heterodyne interferometry w ith transmitted ellipsometry, a new precision method with high speed was applied to the measurement of nanometer film. T he relationships betw een accuracy of ellipsometric parameters and measurement results were discussed in terms of numeric analysis of coefficient of complex sensitivit y. Two acoustooptic modula- tors were used to generate 20kHz beat frequency, so the resolution of phase measurement reached 0. 1b by simply direct-phase- comparison method, and no wave plates and moving mechanism appeared in the system. With automation process and high ant-i interference performance, this method is applicable to cont inuous measurements on t he industrial spot. The possibility up to sub- nanometer accuracy was demonstrated by the experimental results. Key words : optical measurement; film; heterodyne interferometry; ellipsometry; acoustoo