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Atmospheric pressure chemical vapour deposition of VO2 and.pdf
A R T I C L E w C M J o w h a u r Atmospheric pressure chemical vapour deposition of VO and w e t n m e a 2 . l r r o s i i f VO /TiO ?lms from the reaction of VOCl , TiCl and water c s a . t 2 2 3 4 l o r s r y g / Uzma Qureshi, Troy D. Manning and Ivan P. Parkin* m a t e r Department of Chemistry, University College London, 20 Gordon Street, London, UK i a l WC1H OAJ s Received 17th December 2003, Accepted 27th January 2004 First published as an Advance Article on the web 24th February 2004 Vanadium dioxide ?lms were deposited on glass from the APCVD reaction of VOCl3 and water at 650 uC. Introduction of a second precursor TiCl4 affected the growth morphology of the VO2 ?lms but did not incorporate any detectable titanium. The ?lms were characterised by XPS, XRD, Raman, EDAX and SEM. Interestingly the VO2 ?lms formed in the presence of TiCl4 showed a reduction in the thermochromic switching temperature from 69 uC in bulk VO to 49 uC. APCVD of TiCl /VOCl at a substrate temperature of 2 4 3 600 and 550 uC afforded composite TiO2/VO2 ?lms. These ?lms exhibited photoinduced hydrophilicity, photocatalysis and a thermochromic switching temperature of 51 uC. Introduction accomplished by resistive elements that were regulated by Eurotherm controllers and RS type-k thermocouples. Intelligent window coatings respond to an external stimulus VOCl3 Aldrich UK, 99% was transferred to a bubbler and with increasing sophistication on an ‘as needs’ basis, this distilled water was injected into the plain-line gas-?ow using a includes thermochromic coatings, these are coatings that ?xed-rate syringe-driver 0.475 cm min21 . The amount of change re?ectance–transmission properties with temperature. water introduced was controlled via syringe size. The substrate Thermochromic materials are often characterised by a semi- was SiO2-precoated standard ?oat glass Pilkington, UK conductor to
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