O-%2c2-中α型射频放电的理论的研究.pdf

摘 要 在氧碘激光器及氧气放电等离子体的研究领域，射频放电已得到越来越多的关注 和应用。与其它放电方式相比，它没有腐蚀性，无污染，本身有着很高的稳定性和均 匀性。虽然研究人员在理论与试验两方面都取得了不少的进展，但就目前来讲，对它 的研究较多的受制于难以提高氧碘激光器的生成物即单重氧的产率，因此必须考虑进 行改进。 本文侧重于氧气中 α型射频放电的理论研究，是因为放电中能量消耗较低，激发 效率较高。文章说明了氧气放电中采用射频方式的优点；从理论上分析了激光器所用 的射频电源系统，分三个核心部分设计了射频源，对负载以及连接二者的阻抗匹配网 络也都进行了详细的论述与计算，对设计的激光器射频电源和气体负载连接进行了放 电验证的实验，并与连接直流电源作了对比，前者效果明显得多；结合容性射频放电 的基本特性，对采用平板结构的激光器氧气射频放电建立了理论模型，通过数值方法 求解后，分纯氧气、氧气和氩气的混合气体、氧气和氦气的混合气体三种情形讨论与 单重氧产率密切相关的放电等离子体特性，得到放电区域中电子数密度和电场的空间 分布，分析放电参数之间的关系为提高单重氧的产率提供理论依据；阐述了氧气分子 与原子的能级和谱线，对氧气激光等离子体放电，通过光栅光谱仪对等离子体放电进 行测量，经计算机处理得到发射光谱，根据检测到的原子等的跃迁谱线，了解氧原子 分解情况，知道放电等离子体的形成途径，进而估算电子能量。 关键词： 氧碘激光器；α型射频放电；等离子体 I Abstract In the field of the researches on the oxygen iodine lasers and oxygen discharge plasma, RF discharge is becoming the focus and is widely used. In contrast with other discharge modes, it’s no corrosive and clean, with its high stability and uniformity. Researches on RF discharge are confined to a problem that it’s difficult to increase the production of singlet delta oxygen, although much progress is made in theories and experiments. So it must be improved. In this thesis, theoretical research on α-RF discharge of oxygen is mainly illustrated because of lower energy loss and higher excitation efficiency. First of all, advantages of RF discharge of oxygen are declared. Then, it makes analysis of RF power supply system in lasers: the RF power supply is designed; the load and the impedance matching network which connects the power supply with the load are also discussed and calculated. An experiment of comparing DC discharge with RF discharge is carried out, and the result of latter is absolutely better. A theoretical model of oxygen RF discharge in the slab laser is established accordi