ecr-pa的激发增强和ecr-pla中的气相反应.pdfVIP

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2015-10-26 发布于贵州
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ecr-pa的激发增强和ecr-pla中的气相反应.pdf

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ecr-pa的激发增强和ecr-pla中的气相反应

目录摘要 ···································································································… … 1 A b str a c t .，·，‘‘，···… … ，，·，·····… … ，.，········. ·... ·········. ··. ··. ···········… … 。···············… … 3 第一章前言 ·······················································································，··… …4 1.1 脉冲激光烧蚀和脉冲激光等离子体 ······················································… …4 1.2 E C R 微波放电和 E C R 等离子体 ···················································，········… …7 1.3 E C R 一PLA 等离子体 ·········································································..… …8 1.4 光发射谱测量 ·················································································… …9 1.5 论文内容概述 ·················································································… … 11 第二章实验装置介绍 ·································································· ····.·…… 12 2 .1 脉冲激光烧蚀装置 ···········································································… … 12 2.2 E C R 等离子体源 ·············································································。… … 13 2 .3 时空分辨光谱测量装置 ·····································································… … 14 第三章 E C R 氮等离子体对 P L A 等离子体的作用 ·············································……16 3 .1 真空和氮气中的 P L A 等离子体 ························································，… … 16 3.1.1 真空和氮气中的 P LA 铝等离子体 ················································… … 17 3.1.2 真空和氮气中的 P LA 碳等离子体 ···············································，… …24 3.1.3 真空和氮气中的 PLA 碳/硼等离子体 ·············································……29 3 .2 E C R 氮等离子体对 P LA 等离子体的作用 ·············································… …引 3 .2 .1 E C R 氮等离子体背景下的 P LA 铝等离子体 ····································… …引