一种掩模与硅片的底面自动对准方法.pdfVIP

第 30 卷 　第 5 期 电 子 器 件 Vol. 30 　No . 5 20 07 年 10 月 　　　 Ch inese J ou r nal Of Elect ro n D evices 　　 Oct . 2 007 3 A Bot t om ide Aut omat ic Al ign men t Ap pr oach f or Ma sk t o Wa f er 1 , 2 1 1 L IU Yun , XU De , T A N Mi n 1. The Key L abor a tory of Comp lex ystems and Intell i gent cience Insti tute of Autom at ion of Chin ese Aca demy of ciences , Beij ing 100080 , Chi na ; 2. Gr a du ate ch ool of Chi nese Ac a demy of ciences , Beij i ng 100080 , Chin a Abstr act :To acqui r e t he align men t mark ’s cen ter po sit io n in t he bot tom si de ali gn ment of ma sk to w afer is a very i mp ortan t step . A moment2based ap p ro ach an d a met ho d based on Hough t r an sform and cl u st eri ng an al ysi s ar e p ropo sed to comp ut e t he sy mmet ric a nd a sy mmetr ic alignment mark s ’ce nte r p o sition s , re2 sp ecti vel y. Wi t h t he calculat ed po si tion of alignme nt mar k ’s cen ter , an app roach i s p r opo sed for t he auto 2 mati c bot t om si de ali gn ment of ma sk to w afer . i mul ations i llu st r ate t he feasibilit y of t he p r opo sed align2 men t ap p ro ach . Key wor ds :bot tom side ali gn ment ; hough t r an sfer ; cl uster in g an al ysi s ; mask ;w afer E EACC :250 0F 3 一 种 掩 模 与 硅 片 的 底 面 自 动 对 准 方 法 1 ,2 1 1 刘 　云 ,徐 　德 , 谭 　民