DevelopmentofaMicroCuttingandDeformingSystemfor.PDFVIP

Development of a Micro Cutting and Deforming System for GlassDevelopment of a Micro Cutting and Deforming System for Glass Development of a Micro Cutting and Deforming System for GlassDevelopment of a Micro Cutting and Deforming System for Glass MaterialsMaterials MaterialsMaterials Shin’ichi WARISAWA, Takashi KARINO, Pairat Tangpornprasert, Mamoru MITSUISHI Department of Engineering Synthesis, School of Engineering, The University of Tokyo 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan warisawa@nml.t.u-tokyo.ac.jp 1. Introduction Many papers have been reported concerning the ductile mode cutting. Yoshino et al. have reported that the critical depth of cut became larger in case of cutting a single crystal silicon under the high hydro static pressure condition [1]. The atmosphere dependency of the cutting mode for an optical glass has been investigated [2]. By the way, it has been reported that brittle materials, especially a glass material, present a plastic deformation manner at the nano to micro scale as well as a ductile cutting mode [3,4]. The characteristic feature has been verified mainly by the Vickers indentation or scratching test. A development of a system that can realize ductile mode cutting and deformation at the nano to micro scale will contribute very much to produce nano/micro optical devices or modify a part of geometry of optical parts. The paper deals with the micro cutting and deforming system for brittle materials. First, the paper explains the configuration of the developed system to be a shaper which can realize a nano-meter order d