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AnIntroductiontoElectronandionguns-KimballPhysics.PDF
Y AN INTRODUCTION TO
R
A
N ELECTRON AND ION GUNS
I
M
I
L
E
R
P
WHAT IS AN ELECTRON OR ION GUN? The figures below represent the overall structure of a typical,
electron gun in three different ways. The first figure, A, is a three-
An electron or ion gun is a scientific instrument that generates dimensional drawing showing a cross-section of the gun. B is a plot of
either electrons or ions, and forms them into a usable beam. The the electrons’ paths in the gun due to the fields set up by different
electron and ion guns built by Kimball Physics are used in a wide potentials on the gun elements; this illustrates how electron optics is
variety of basic research and industrial applications: from microscopic similar to light optics. The third figure, C, is a schematic block diagram
surface physics studies and semiconductor processing to large showing the power supplies (represented as circles) that apply
spacecraft testing. The guns range in size from about a centimeter to voltages to the parts of the gun to produce and control the electron
over half a meter long. The energy of the electrons produced also beam.
varies with the gun: from low-energy models with an energy range of
5 eV - 1000 eV, to high-energy ones with an energy range of up to
100 keV. Many different kinds of ions can be produced depending on
the gun, including positive ions of most gases, reactive ions, and alkali
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