薄膜物理与技术复习课.pdf.docVIP

真空相关 ?真空是指低于一个大气压的气体空间。常用“真空度”度量。真空 度越高，压强越小。 “vacuum” = lower molecular density than in our atmosphere results in a lower pressure of gas.The vacuum degree is higher, the higher the vacuum degree, the smaller the pressure. ?常用计量单位：Pa, Torr, mmHg, bar, atm.。关系如下： ?1mmHg=133.322Pa, ?1 Torr=atm/760=133.322Pa≈1mmHg ?1 bar=105Pa  最可几度 平均速度 均方根速度  vm ? 2kT ? 2RT ? 1.41 RT M m M va ? 8kT ? 8RT ? 1.59 RT ?m ?M M vr ? 3kT ? 3RT ? 1.73 RT m M M  ?平均自由程：每个分子在连续两次碰撞之间的路程称为自由程；其统 计平均值成为平均自由程。 Mean free path: the distance between each molecule in a continuous two collision is called a free path, and the average value of the system is a mean free path. ? ? kT ?? 2 P 2  根据气体分子运动论，在气体压力为P时，单位时间内碰撞单位面积器 壁上的分子数量，即碰撞分子流量（通量或蒸发速率）。 According to kinetic theory of gases, the gas pressure when P, the number of molecular collisions per unit time per unit area of the wall, ie, molecular collision flow (flux or evaporation rate). 平均自由程与分子密度n和分子直径σ的平方成反比关系，平均自由 程与压强成反比，与温度成正比。 The mean free path of molecules and molecular density n and σ is inversely proportional to the square of the diameter, and the pressure is inversely proportional to the mean free path is proportional to temperature. ?为什么用薄膜？Why thin films? （1）薄膜所用原料少，容易大面积化，而且可以曲面加工。(研究和使用成 本) 例：金箔、饰品、太阳能电池，GaN，SiC，Diamond； Materials used less film, easily large area, and can be surface processing. (Research and cost) Example: gold, jewelry, solar, GaN, SiC, Diamond （2）新的效应: 某一维度很小、比表面积大. 例：限域效应、表面和界面效 应、耦合效应，隧穿效应、极化效应；新的效应:?某一维度很小、比表面积大.?例：限域效应、表面和界面效?应、耦合效应，隧穿效应、极化效应； New effects: for a dimension is small, than a large surface area. For example: confinement effect, surface and interface effect of, coupling effect, tunneling effect, polarization effect; 可以获得体态下不存在的非平衡和非化学计量比结构； Can be o