管筒内壁自激射频放电等离子体浸没离子注入方法的研究.pdf

Classified Index: TG172.44 U.D.C.: 621.193 Dissertation for the Doctoral Degree in Engineering PLASMA IMMERSION ION IMPLANTATION OF CYLINDRICAL BORE BASED ON SELF EXCITED RADIO-FREQUENCY GLOW DISCHARGE Candidate ： Gong Chunzhi Supervisor： Prof. Yang Shiqin Associate Supervisor ： Prof. Tian Xiubo Academic Degree Applied for ： Doctor of Engineering Speciality： Material Processing Engineering Affiliation ：