碳纳米管微离化传感器的应用地研究.pdf

碳纳米管微离化传感器的应用研究 摘 要 本课题主要针对基于离化原理的微传感结构进行了测试和研究，并 集中就呼吸性能进行了系统化的设计，实现了基于可编程片上系统的便 携式呼吸传感器系统。 具体的工作包括以下几个方面： 1) 设计的电离式气体传感器灵敏度高、响应和回复时间短、功耗低 的优势，突出表现在气体成分、湿度和呼吸监测三个方面； 2) 器件主要功能部分为碳纳米管构成的微电极，利用了其作为一维 结构所具有的电场收敛作用，在金属电极微间隙的基础上进一步 地增强了局部电场强度，降低了待测气体的离化电压； 3) 通过在碳纳米管表面进行金属覆层，改善了功能层机械性能和电 学性能的稳定性，在碳纳米管表面进行介电质覆层形成 DBD 结构， 有效地抑制了电流的自由增长，保证了器件的使用寿命和稳定性； 4) 设计搭建的测试系统验证了气体传感器对气体成分、湿度和呼吸 三种信号的稳定响应，数据很好地符合相关理论； 5) 围绕敏感元件，结合微弱信号检测电路，实现了对纳安级电流的 采集，随后的数字信号处理实现了呼吸波的实时显示和呼吸波形 的存储，最终成功地完成了便携式呼吸传感器系统。 关键词：碳纳米管，MEMS，离化传感器，呼吸传感器系统 Application Research of Carbon Nanotube Micro Ionization Sensor ABSTRACT This thesis contains the test and research in the application field of microstructure sensor based on the CNTs and ionization principle, and the design and approach of a completed portable breath sensor system. This system is based on the technology of system on programmable chip (SOPC). The detailed tasks include the following aspects: The designed micro ionization sensitive structure has the advantages of high resolution, unique stability, and low energy consumption; The main function section is the micro electrode formed by the CNT, the electrical field convergence effect as one-dimension material is utilized to decrease the ionization voltage of the gas under test further based on the micro gas between the metal electrodes ； The mechanical and electrical stability of the function layer is improved by metal coating on the surface of the CNTs, meanwhile, the DBD structure composed of the CNTs and the dielectric suppresses the increment freely of the discharge current, ensures the stability and operation life; The desig