朱荻——微纳加工技术-3.pptVIP

* AFM工作原理 通过隧道电流检测力敏元件的位移来实现力敏元件探针尖端与表面原子之间的排斥力（10-8-10-6牛顿）的监测，进而得到表面型貌像。 调节针尖位置和偏压，将氙原子吸附后移动，每个字母长5纳米。（超高真空，超低温） 在石墨表面通过搬迁碳原子绘制出的世界上最小的中国地图 STM deposit This lithographic capability was related to a phenomena that occurred when a gold tip had a short (? sec voltage pulse applied to it. This would deposit a small mound of gold atoms on the substrate. The mounds each contain 100-200 atoms and can be deposited in a pattern (a globe showing the western hemisphere) 西半球：4V600纳秒脉冲，原子从金针尖发射，在金样品留下直径10纳米高1-2纳米小丘。地图直径1微米。 AFM lithography: grooves in Si with a width of about 30nm and a depth of 45nm