基于等效误差法的直线电机XY平台二阶滑模控制.pdfVIP

第 30 卷 第 6 期 中 国 电 机 工 程 学 报 Vol.30 No.6 Feb.25, 2010 88 2010 年 2 月 25 日 Proceedings of the CSEE ©2010 Chin.Soc.for Elec.Eng. 0258-8013 (2010) 06-0088-05 TM 359; TP 273 A 470 40 文章编号： 中图分类号： 文献标志码： 学科分类号： ⋅ 基于等效误差法的直线电机 XY 平台二阶滑模控制 王丽梅，金抚颖，孙宜标 (沈阳工业大学电气工程学院，辽宁省 沈阳市 110178) Second Order Sliding Mode Control for Linear Motor XY Table Based on Equivalent Errors Method WANG Li-mei, JIN Fu-ying, SUN Yi-biao (School of Electric Engineering, Shenyang University of Technology, Shenyang 110178, Liaoning Province, China) ABSTRACT: The contour accuracy of XY table directly 展。具有代表性的XY二维直线电机平台系统，以 driven by two linear motors was influenced by the nonlinear 其快速的响应、准确的定位和高可靠性广泛应用于 dynamic, system uncertainties and complicated contour error 高速自动化加工设备等领域[1] 。 model of curve trajectory. To establish XY table model that XY平台由 2 台永磁同步直线电机直接驱动轴 easily calculated and suitable for general curves, the equivalent 向相互垂直的XY 两轴进行平面精密轨迹运动，为提 errors method applicable for multi-axis nonlinear motion system was adopted. In order to improve the contour accuracy 高其轮廓加工精度，许多研究方法侧重于通过单轴 [2-3] and robustness of linear motor XY table, the second order 跟踪控制来减小整个系统的轮廓误差 ，但此类方 sliding mode contour controller was designed. Then the sliding 法不能完全解决双轴间动态不匹配等因素对轮廓 mode surfaced and its derivative approached zero in finite time. 精度造成的影响。Koren首先提出了交叉耦合控制 The effects of chattering and uncertainties were reduced